Beilstein J. Nanotechnol.2019,10, 1636–1647, doi:10.3762/bjnano.10.159
calculations provide a guide to optimizing parameter settings for the nondestructive diagnosis of flexiblecircuits. Defect detection of the embedded circuit pattern was also carried out, which indicates the capability of imaging tiny subsurface structures smaller than 100 nm by using CR-AFM.
Keywords: atomic
force microscopy (AFM); contact resonance atomic force microscopy (CR-AFM); contact stiffness; defect detection; flexiblecircuits; subsurface imaging; Introduction
With the rapid shrinkage of microelectronic devices, flexiblecircuits are intensively used while being functionalized as supercapacitors
been carried out using CR-AFM for subsurface imaging, its application in defect diagnosis for flexiblecircuits has seldom been reported. Intuitively, the presence of buried metal circuit patterns in the tip-generated stress field will alter the local indentation modulus. This consequently leads to
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Figure 1:
(a) Schematic illustration of CR-AFM imaging on the flexible circuit sample. (b) An enlarged sectio...
Beilstein J. Nanotechnol.2017,8, 418–424, doi:10.3762/bjnano.8.44
application such as thin flexiblecircuits and interconnecting transparent conductive electrodes for solar cells and/or touch screens [6]. Among the possible dopants for Gr, an easily accessible and promising one is oxygen. It acts as a p-type dopant and can also be activated by thermal treatments [13][14
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Figure 1:
(a) AFM morphology image and (b) micro-Raman spectra of the as transferred graphene on SiO2 substra...